Ultra-high-Q UV microring resonators based on a single-crystalline AlN platform

X Liu, AW Bruch, Z Gong, J Lu, JB Surya, L Zhang… - Optica, 2018 - opg.optica.org
Optica, 2018opg.optica.org
Development of low-loss photonic components in the ultraviolet (UV) band will open new
prospects for classical and quantum optics. Compared with other integrated platforms,
aluminum nitride (AlN) is particularly attractive as it features an enormous bandgap of∼ 6.2
eV and intrinsic χ^(2) and χ^(3) susceptibilities. In this work, we demonstrate a record quality
factor of 2.1× 10^ 5 (optical loss∼ 8 dB/cm) at 390 nm based on single-crystalline AlN
microrings. The low-loss AlN waveguide represents a significant milestone toward UV …
Development of low-loss photonic components in the ultraviolet (UV) band will open new prospects for classical and quantum optics. Compared with other integrated platforms, aluminum nitride (AlN) is particularly attractive as it features an enormous bandgap of ∼6.2  eV and intrinsic χ^(2) and χ^(3) susceptibilities. In this work, we demonstrate a record quality factor of 2.1×10^5 (optical loss ∼8  dB/cm) at 390 nm based on single-crystalline AlN microrings. The low-loss AlN waveguide represents a significant milestone toward UV photonic integrated circuits as it features full compatibility for future incorporation of AlGaN-based UV emitters and receivers. On-chip UV spectroscopy, nonlinear optics, and quantum information processing can also be envisioned.
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