Vibration energy harvesting with PZT micro device
P Muralt, M Marzencki, B Belgacem, F Calame… - Procedia …, 2009 - Elsevier
A micro power generator harvesting vibration energy by resonant inertial oscillation of a
piezoelectric laminated cantilever with proof mass was designed, fabricated, and
characterized. The active part with 2 µm thick PZT on 5 µm silicon was equipped with
interdigitated electrodes to achieve higher voltages. A coupling constant k2= 5% was
derived from the difference in resonance frequencies at low and high impedance. At optimal
load impedance, a voltage of 1.6 V and an output power of 1.4 µW was measured with a 0.8 …
piezoelectric laminated cantilever with proof mass was designed, fabricated, and
characterized. The active part with 2 µm thick PZT on 5 µm silicon was equipped with
interdigitated electrodes to achieve higher voltages. A coupling constant k2= 5% was
derived from the difference in resonance frequencies at low and high impedance. At optimal
load impedance, a voltage of 1.6 V and an output power of 1.4 µW was measured with a 0.8 …
A micro power generator harvesting vibration energy by resonant inertial oscillation of a piezoelectric laminated cantilever with proof mass was designed, fabricated, and characterized. The active part with 2 µm thick PZT on 5 µm silicon was equipped with interdigitated electrodes to achieve higher voltages. A coupling constant k2=5% was derived from the difference in resonance frequencies at low and high impedance. At optimal load impedance, a voltage of 1.6 V and an output power of 1.4 µW was measured with a 0.8x1.2 mm cantilever having an active area of 0.8x0.4 mm, excited with 2g at 870 Hz.
Elsevier
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