Multiple sensor array comprising 16 x 2 sensing elements were realized using RF sputtered
WO3 thin films. The sensor films were modified with a thin layer of sensitizers namely Au, Ni,
Cu, Al, Pd, Ti, Pt. The resulting sensor array were tested for their response towards different
gases namely H2S, NH3, NO and C2H5OH. The sensor response values measured from the
response curves indicates that the sensor array generates a unique signature pattern (bar
chart) for the gases. The sensor response values can be used to get both qualitative and …