frequency (RF) magnetron sputtering technique. A single hot-pressed Ti-Al-BN target was
used for the deposition process. With glancing angle X-ray diffraction analysis (GAXRD), the
nanocrystalline (nc-)(Ti, Al) N phase was identified. In addition, the existence of BN and TiB2
amorphous (a-) phase were detected by X-ray photoelectron spectroscopy (XPS) analysis.
Thus, the deposited TiAlBN coatings were confirmed as nc-(Ti, Al) N/a-BN/a-TiB2 …