characterization of TiAlBN nanocomposite coating deposited via radio frequency magnetron sputtering using single hot-pressed target

ZM Rosli, KW Loon, J Mohd Juoi, N Nayan… - Advanced Materials …, 2013 - Trans Tech Publ
ZM Rosli, KW Loon, J Mohd Juoi, N Nayan, ZB Mahamud, Y Yusuf
Advanced Materials Research, 2013Trans Tech Publ
TiAlBN coatings have been deposited at varying bias voltage of 0,-60, and-150 V by radio
frequency (RF) magnetron sputtering technique. A single hot-pressed Ti-Al-BN target was
used for the deposition process. With glancing angle X-ray diffraction analysis (GAXRD), the
nanocrystalline (nc-)(Ti, Al) N phase was identified. In addition, the existence of BN and TiB2
amorphous (a-) phase were detected by X-ray photoelectron spectroscopy (XPS) analysis.
Thus, the deposited TiAlBN coatings were confirmed as nc-(Ti, Al) N/a-BN/a-TiB2 …
TiAlBN coatings have been deposited at varying bias voltage of 0, -60, and-150 V by radio frequency (RF) magnetron sputtering technique. A single hot-pressed Ti-Al-BN target was used for the deposition process. With glancing angle X-ray diffraction analysis (GAXRD), the nanocrystalline (nc-) (Ti,Al)N phase was identified. In addition, the existence of BN and TiB2 amorphous (a-) phase were detected by X-ray photoelectron spectroscopy (XPS) analysis. Thus, the deposited TiAlBN coatings were confirmed as nc-(Ti,Al)N/a-BN/a-TiB2 nanocomposite. On the other hand, it was found that optimum bias voltage used in present study is-60 V where the deposited TiAlBN coating exhibits an excellent adhesion quality. The adhesion quality of the coatings deposited at-60V bias voltage is classified as HF 1 evaluated using the Rockwell-C adhesion test method (developed by the Union of German Engineers).
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