Miniaturization of cantilever dimensions will increase both the mass and spatial resolution of
a resonating cantilever-based mass sensor, which monitors the mass change of the …

In this paper, we present the design, fabrication and characterization of the CMOS
micromachined cantilevers for mass sensing in the femtogram range. The cantilevers …

A cantilever based micro electro mechanical system (MEMS) for mass detection is
presented. The sensor for multiple detections is composed by several cantilevers in an array …

A simple linear electromechanical model for an electrostatically driven resonating cantilever
is derived. The model has been developed in order to determine dynamic quantities such as …

Nanomechanical resonators have been monolithically integrated on preprocessed
complementary metal-oxide-semiconductor (CMOS) chips. Fabricated resonator systems …

We present a method for microcantilever resonant frequency detection. We measure the
direct current from an intermittent contact once every vibration cycle between the conducting …

In this work, we present an on chip microelectromechanical system based on an array of
cantilevers for mass detection. The sensor transducer, using polysilicon as structural layer …

Cantilever sensors have been the subject of a growing attention in the last decades and
their use as mass detectors has been proved with attogram sensitivity. Systems of …

We have fabricated Al nanocantilevers using a simple, one mask contact UV lithography
technique with lateral and vertical dimensions under 500 and 100 nm, respectively. These …

This paper reports ultrasensitive mass detection based on the relative change in the
amplitude ratio of the first mode oscillation using self-excited coupled microcantilevers. The …