A novel single-mask process for fabrication of silicon microcantilevers with integral silicon
tips for use in atomic force microscopy (AFM) is described. The highly cusped tips with radii …

Scanning spreading resistance microscopy (SSRM) and scanning capacitance microscopy
(SCM) are two different methods for carrier profiling on semiconductor devices based on the …

Novel force‐sensing microcantilevers with sharp tips have been used to obtain atomic force
microscope images of atomically flat, layered compounds as well as microfabricated …

The lateral resolution obtainable in atomic force microscopes is determined to a large extent
by the sharpness of the sensing tip and its profile. Single-crystal silicon with its excellent …

The paper presents a newly developed high-yield micro-fabrication technology for single-
crystalline silicon atomic force microscope (AFM) probes. Both the tips and the cantilevers …

A monocrystalline silicon lever with an integrated silicon tip for a Force/Fiction Microscope
was realized. Theoretical studies have been carried out to find the shape and dimensioning …

Monocrystalline silicon cantilevers with integrated silicon tips for scanning force microscopy
are fabricated by means of micromachining techniques. Theoretical considerations including …

Atomic force microscopy (AFM) is a newly developed high resolution microscopy technique
which is capable of mapping forces near surfaces or, by means of these forces, the …

A fabrication process for a silicon (Si)/ceramic hybrid cantilever, proposed for obtaining even
homogeneous quality and low cost micro/nano-cantilever products, is described and the …

We have developed a novel process for the microfabrication of atomic force microscope
(AFM) cantilevered tips from silicon-on-insulator (SOI) wafers. The tip and cantilever are …