We developed a multi-probe atomic force microscopy (AFM) system using piezoelectric thin
film (PZT) cantilevers. The use of self-sensing cantilevers with integrated deflection sensors …

We have fabricated and operated two cantilevers in parallel in a new mode for imaging with
the atomic force microscope (AFM). The cantilevers contain both an integrated piezoresistive …

This paper presents a piezoelectric sensor for detecting force gradients in the noncontact
atomic force microscope (AFM). To simplify the force gradient detecting system of the …

A piezoelectric force sensor has been developed to overcome the complexity of the force
detector of the conventional non contact atomic force microscope (AFM). The sensor …

This article summarizes improvements to the speed, simplicity and versatility of tapping
mode atomic force microscopy (AFM). Improvements are enabled by a piezoelectric …

An atomic force microscope with a stationary sample and a scanning cantilever using an
optical lever method is demonstrated for the first time. The cantilever tip is translated to …

We successfully developed an atomic force microscope (AFM) with a batch‐fabricated
silicon cantilever with a pyramidal stylus. The high quality lead zirconate titanate (PZT) …

A non-contact atomic force microscope (NC-AFM) based on a microfabricated piezoelectric
cantilever is presented. A single piezoelectric lead zirconate titanate thin film layer on the …

We developed a dual-probe (DP) atomic force microscopy (AFM) system that has two
independently controlled probes. The deflection of each cantilever is measured by the …

This article describes a new method of measuring the force gradient between the tip and a
sample without directly detecting fine cantilever displacement in an atomic force microscope …