Abstract/The Atomic Force Microscope (AFM) is a widely used, high resolution surface
imaging instrument. Making accurate nanometer-scale measurements with an AFM requires …

Atomic force microscopes (AFMs), which generate three dimensional images with
nanometer level resolution, are increasingly being used as tools for sub-micrometer …

Atomic force microscopes (AFMs) generate three dimensional images with nanometer level
resolution and, consequently, are used in the semiconductor industry as tools for sub …

The National Institute of Standards and Technology (NIST) has a multifaceted program in
atomic force microscope (AFM) dimensional metrology. One component of this program, and …

The rapid advancement of nanotechnology is increasingly demanding measurements
carried out at nano-scale be more accurate, comparable and traceable to the international …

AFMs are increasingly used in the semiconductor industry as tools for sub-micrometer
dimensional metrology. The scale of an AFM must be calibrated in order to perform accurate …

Atomic force microscopes (AFMs) are potentially capable of dimensional metrology with
nanometer scale accuracy. Feature width measurements, however, can be severely affected …

The National Institute of Standards and Technology (NIST) has a multifaceted program in
atomic force microscope (AFM) dimensional metrology. There are two major instruments …

Since the atomic force microscope (AFM) was invented, its applications have been explored
extensively. Because of its ability to scan surfaces nondestructively with nanometer lateral …

Scanning probe microscopes, in particular the atomic force microscope (AFM), have
developed into sophisticated instruments that, throughout the world, are no longer used just …