The atomic force microscope (AFM) has the potential for profiling on a nanometer scale.
However, for the AFM to be useful as a reliable and accurate metrology tool, the atomic force …

A microprobe having an ultrasharp and high‐aspect‐ratio stylus was made using a directly
bonded silicon‐on‐insulator (SOI) wafer. The stylus and cantilever were made of 8 μm‐thick …

Atomic force microscopy (AFM) is a newly developed high resolution microscopy technique
which is capable of mapping forces near surfaces or, by means of these forces, the …

Atomic force microscopy (AFM) is increasingly relied on to image and measure micron and
submicron scale surface features. Consistent interpretation of AFM information is, however …

Different fabrication technologies for atomic force microscopy (AFM) probes have been
investigated, emphasizing the fabrication of versatile tip shapes, which can be integrated …

The paper presents a newly developed high-yield micro-fabrication technology for single-
crystalline silicon atomic force microscope (AFM) probes. Both the tips and the cantilevers …

A new atomic force microscope (AFM) adapted for ultrahigh vacuum operation is described.
This AFM utilizes the optical beam deflection method to detect the cantilever displacement …

The atomic force microscope (AFM) has become a practical tool for mapping surface
features with a resolution better than 10 nm. As such, in recent years the demand from …

Atomic force microscopy (AFM) tips have been evaluated on a submicrometer scale using a
scanning Auger electron microscope (SAM) with a field emission electron gun. The …

The quality of images obtained by scanning tunneling microscopy (STM) and atomic force
microscopy (AFM) is highly dependant on the size and shape of the scanning tip. This …