We describe the design, fabrication, and calibration testing of a new piezoresistive cantilever
force sensor suitable for the force calibration of atomic force microscopes in a range …

We describe a method to calibrate the spring constants of cantilevers for atomic force
microscopy (AFM). The method makes use of a “piezosensor” composed of a piezoresistive …

There are many atomic force microscopy (AFM) applications that rely on quantifying the
force between the AFM cantilever tip and the sample. The AFM does not explicitly measure …

The atomic force microscope (AFM) is a tool that enables the measurement of precisely
localized forces with unprecedented resolution in time, space and force. At the heart of this …

A miniature capacitive force sensor which fits in the sample position of an atomic force
microscope (AFM) has been used to calibrate the force applied by the scanning tip during …

The measurement of small forces by atomic force microscopy (AFM) is of increasing
importance in many applications. For example, in analytical applications where individual …

Abstract− The force sensitivity of an atomic force microscope is calibrated directly using an in
situ realization of primary electrostatic forces ranging from 320 pN to 3.3 nN with accuracy of …

We present here a method to calibrate the lateral force in the atomic force microscope. This
method makes use of an accurately calibrated force sensor composed of a tipless …

Recent experiments with the National Institute of Standards and Technology (NIST)
Electrostatic Force Balance (EFB) have achieved agreement between an electrostatic force …

In this paper, we investigate the characteristics of a piezoresistive AFM cantilever in the
range of 0–1.6 μN by using nano force calibrator (NFC), which consists of a high precision …