A metrological large range atomic force microscope (Met. LR-AFM) has been set up and
improved over the past years at Physikalisch-Technische Bundesanstalt (PTB). Being …

For manufacturing at the nanometre scale a method for rapid and accurate measurement of
the resultant functional devices is required. Although atomic force microscopy (AFM) has the …

A compact and two-dimensional atomic force microscope (AFM) using an orthogonal sample
scanner, a calibrated homodyne laser interferometer and a commercial AFM head was …

A high-speed atomic force microscope (HS-AFM) based on a tip-sample combined scanning
architecture is presented. In this system, the X-scanner, which is separated from the AFM …

Atomic force microscopes (AFMs) generate three dimensional images with nanometer level
resolution and, consequently, are used in the semiconductor industry as tools for sub …

An atomic force microscope (AFM) has been developed for studying interactions between
the AFM tip and the sample. Such interactions need to be taken into account when making …

The design of a large measurement-volume metrological atomic force microscope (AFM) is
presented. The translation of the sample is accomplished with multiple stages which allow …

The atomic force microscopy (AFM) is a very important tool for imaging and investigating the
complex force interactions on sample surfaces with high spatial resolution. In the AFM, two …

Advances in the manufacture of integrated circuits, x‐ray optics, magnetic read–write heads,
optical data storage media, and razor blades require advances in ultraprecision metrology …

Low measurement speed remains a major shortcoming of the scanning probe microscopic
technique. It not only leads to a low measurement throughput, but a significant measurement …