Scanning rates of the atomic force microscope (AFM) could be significantly increased by
integrating the force sensing probe with microelectromechanical systems (MEMS). We …

In this paper a micromachining method for batch fabrication of in-plane atomic force
microscope (AFM) probes that consist of a sharp silicon nitride tip on a monocrystalline …

Silicon microfabrication techniques are well suited for the fabrication of complex integrated
microsystems including sensors, actuators and signal processing units. In particular, a high …

The atomic force microscope (AFM) is an invaluable scientific tool; however, its conventional
implementation as a relatively costly macroscale system is a barrier to its more widespread …

We report here on results of AFM microscopy using laserless MEMS based probes. This new
concept of atomic force microscope (AFM) probes using bulk-mode silicon resonators was …

A 2-degree of freedom microelectromechanical systems nanopositioner designed for on-
chip atomic force microscopy (AFM) is presented. The device is fabricated using a silicon-on …

The atomic force microscope (AFM) has become a practical tool for mapping surface
features with a resolution better than 10 nm. As such, in recent years the demand from …

A family of silicon micro-sensors for Atomic Force Microscope (AFM) is presented that allows
to operate with integrated transducers from medium to high frequencies together with …

The development of ultrasensitive silicon-based microcantilevers has significantly improved
the imaging resolution of the Atomic Force Microscope (AFM). However, most of these …

For the purpose of improvement in resolution of force gradient and mass detection in atomic
force microscope (AFM), we are developing cantilevers measuring from 100 nm to several …