Inline multilayer thickness sensing by using terahertz time-domain spectroscopy in reflection geometry

S Krimi, J Klier, M Herrmann… - … Waves (IRMMW-THz …, 2013 - ieeexplore.ieee.org
We present a novel approach to determine the individual layer thickness in a dielectric
multilayer sample using pulsed terahertz spectroscopy in reflection geometry. In a first step …

Multilayer extraction of complex refractive index in broadband transmission terahertz time-domain spectroscopy

NR Greenall, LH Li, EH Linfield… - … and Terahertz waves …, 2016 - ieeexplore.ieee.org
In terahertz spectroscopy, multi-layered samples often need to be measured, for instance in
a liquid flow cell, and this complicates the extraction of material parameters. We present a …

Multilayer thickness determination using continuous wave THz spectroscopy

D Stanze, B Globisch, RJB Dietz… - IEEE Transactions …, 2014 - ieeexplore.ieee.org
We present a multilayer thickness measurement system based on optoelectronic continuous
wave THz spectroscopy. Due to its wide tuning range, high frequency resolution, and fast …

Terahertz time-domain technology for thickness determination of industrial relevant multi-layer coatings

F Ellrich, J Klier, S Weber, J Jonuscheit… - … and Terahertz waves …, 2016 - ieeexplore.ieee.org
Nowadays, aircrafts and cars are coated with several layers of coating. Hence, demands for
thickness monitoring of each individual layer within a multi-layer coating system are rising …

Influence of system performance on layer thickness determination using terahertz time-domain spectroscopy

S Weber, L Liebelt, J Klier, T Pfeiffer, D Molter… - Journal of Infrared …, 2020 - Springer
The quality of coatings in industrial applications and scientific research with thicknesses in
the micrometer range is an important criterion for quality management. Therefore, thickness …

Terahertz multilayer thickness measurements: comparison of optoelectronic time and frequency domain systems

L Liebermeister, S Nellen, RB Kohlhaas… - Journal of Infrared …, 2021 - Springer
A bstract We compare a state-of-the-art terahertz (THz) time domain spectroscopy (TDS)
system and a novel optoelectronic frequency domain spectroscopy (FDS) system with …

Extraction of material parameters of a bi-layer structure using Terahertz time-domain spectroscopy

BB Jin, CH Zhang, XF Shen, JL Ma, J Chen… - Science China …, 2014 - Springer
For a bi-layer structure consisting of a film deposited on a substrate, a new extraction
method is proposed using which we can extract both the material parameters of the film and …

Continuous wave terahertz spectrometer as a noncontact thickness measuring device

R Wilk, F Breitfeld, M Mikulics, M Koch - Applied Optics, 2008 - opg.optica.org
We present a low cost terahertz (THz) spectrometer with coherent detection based on two
simple and robust dipole antennas driven by two laser diodes. The spectrometer covers …

Highly sensitive terahertz measurement of layer thickness using a two-cylinder waveguide sensor

M Theuer, R Beigang, D Grischkowsky - Applied Physics Letters, 2010 - pubs.aip.org
We report on the layer thickness determination on dielectrically coated metal cylinders using
terahertz (THz) time-domain spectroscopy. A considerable sensitivity increase of up to a …

Extension of terahertz time-domain spectroscopy: A micron-level thickness gauging technology

H Zhang, L Shi, M He - Optics Communications, 2022 - Elsevier
There is a minimum measurable thickness when gauging micron-level coating films with
time-of-flight based terahertz thickness measurement technologies. To improve this …