We report on a micro-machined resonator for mass sensing applications which is based on
a silicon cantilever excited with a sputter-deposited piezoelectric aluminium nitride (AlN) thin …

This article describes two approaches for sensitivity improvement of a micromachined silicon
T-shaped cantilever resonator for mass sensing applications. In order to increase sensitivity …

We report on a novel fabrication process and preliminary characterization of a
nanomechanical resonating device, which is to be used for mass detection. The fabrication …

In this work, we report on the fabrication and characterization of aluminium nitride (AlN)-
based piezoelectric cantilevers to be applied both as pressure/force or inertial sensors and …

Micro/nanomechanical resonators have been designed and fabricated with the aim to be
used as distributed mass sensors for in situ measurement of the thickness of ultra-thin …

A high quality factor (Q-factor) piezoelectric lead zirconate titanate (PZT) thin film actuated
single crystal silicon cantilever was proposed in this paper for resonant based ultra sensitive …

We present the fabrication and characterization of a 90μm× 40μm× 885nm piezoelectric
micro-cantilever resonator containing a 50nm thick Aluminum Nitride (AlN) piezoelectric film …

Through the use of oscillating microcantilevers, a micromechanical mass detection with a
resolution of a Hz per picogram regime is reported. Through MEMS processes, piezoelectric …

A silicon microcantilever based mass sensor with picogram resolution has been fabricated.
In order to improve its sensitivity value, resonator dimensions were reduced. Working in …

In this work, we present an on chip microelectromechanical system based on an array of
cantilevers for mass detection. The sensor transducer, using polysilicon as structural layer …