In this work, we present an on chip microelectromechanical system based on an array of
cantilevers for mass detection. The sensor transducer, using polysilicon as structural layer …

A cantilever based micro electro mechanical system (MEMS) for mass detection is
presented. The sensor for multiple detections is composed by several cantilevers in an array …

This article describes two approaches for sensitivity improvement of a micromachined silicon
T-shaped cantilever resonator for mass sensing applications. In order to increase sensitivity …

A silicon microcantilever based mass sensor with picogram resolution has been fabricated.
In order to improve its sensitivity value, resonator dimensions were reduced. Working in …

In this paper, we present the design, fabrication and characterization of the CMOS
micromachined cantilevers for mass sensing in the femtogram range. The cantilevers …

Miniaturization of cantilever dimensions will increase both the mass and spatial resolution of
a resonating cantilever-based mass sensor, which monitors the mass change of the …

The paper focuses on a MEMS mass detection sensor using mode localization and
electrostatic actuation to counterbalance the manufacturing defects. The sensor is …

Through the use of oscillating microcantilevers, a micromechanical mass detection with a
resolution of a Hz per picogram regime is reported. Through MEMS processes, piezoelectric …

In this paper, we report on the main aspects of the design, fabrication, and performance of a
microelectromechanical system constituted by a mechanical submicrometer scale resonator …

We report on a micro-machined resonator for mass sensing applications which is based on
a silicon cantilever excited with a sputter-deposited piezoelectric aluminium nitride (AlN) thin …