Residual stress modulation in the diamond-like carbon coatings with incorporation of gold
nanoparticles was studied critically. The films were deposited on glass and Si (100) …

Composite films containing silver (Ag) nanoparticles embedded in amorphous diamond-like
carbon (Ag–DLC) matrix have been deposited on glass and Si (100) substrates using rf …

This paper evaluated the internal stresses of different diamond and diamondlike carbon
(DLC) coatings. For the diamond coatings, the stresses were determined using micro …

We have investigated mechanical properties of diamond-like carbon (DLC) thin films,
particularly the internal compressive stress and ways to alleviate it. Foreign atoms such as …

Cu incorporated diamond-like carbon (Cu-DLC) films were deposited on Si/glass substrate
by a hybrid ion beam deposition system, which consists of a direct current (DC) magnetron …

A hybrid process of plasma-based ion implantation and deposition (PBIID) was used to
achieve relaxation of compressive residual stress in diamond-like carbon (DLC) films. The …

In the last decades hard amorphous carbon coatings have attracted great research interest
as protective optical or tribological coatings because of their smooth surface, chemical …

The stress relief behaviour of diamond-like carbon (DLC) films on glass substrates was
investigated. The rf-plasma-enhanced chemical vapour deposition method was used for the …

Diamond-like carbon (DLC) films with different structures were deposited on Si (100) and
stainless steel substrates in a hybrid deposition system with Ar and CH4 as the feedstocks …

In the present work the correlation of electrical, optical and nano-mechanical properties of
argon-diluted diamond-like carbon (Ar-DLC) thin films with sp3 and sp2 fractions of carbon …