Microcantilever-based mass sensors: working at higher modes against reducing the dimensions

K Lakshmoji, K Prabakar, A Kumar, J Brijitta… - Micro & Nano Letters, 2012 - IET
Enhanced sensitivity and quality factor of microcantilever (MC)-based mass sensors when
working at higher modes and reducing the dimensions are compared. By analysing the out …

Effect of thermal and mechanical properties variations on microcantilever mass sensor performance

M Maroufi, S Zihajehzadeh, M Shamshirsaz… - Microsystem …, 2011 - Springer
Ensuring desirable performance for piezoelectric microcantilever sensors constitutes a
crucial research subject particularly for the applications such as detection of biochemical …

Sensitivity improvement of a microcantilever based mass sensor

M Narducci, E Figueras, MJ Lopez, I Gracia… - Microelectronic …, 2009 - Elsevier
This article describes two approaches for sensitivity improvement of a micromachined silicon
T-shaped cantilever resonator for mass sensing applications. In order to increase sensitivity …

Simple and versatile micro‐cantilever sensors

G Rinaldi, M Packirisamy, I Stiharu, N Mrad - Sensor Review, 2009 - emerald.com
Purpose–The purpose of this paper is to demonstrate the simplicity and versatility of micro‐
cantilever based sensors and to present the influence of added mass and stress on the …

Enhanced mass sensing using torsional and lateral resonances in microcantilevers

LB Sharos, A Raman, S Crittenden… - Applied Physics …, 2004 - pubs.aip.org
We present a method to detect, with enhanced sensitivity, a target mass particle attached
eccentrically to a microcantilever by measuring multiple three-dimensional modes in the …

Mass determination and sensitivity based on resonance frequency changes of the higher flexural modes of cantilever sensors

JD Parkin, G Hähner - Review of Scientific Instruments, 2011 - pubs.aip.org
Micro-and nanocantilevers are increasingly employed as mass sensors. Most studies
consider the first flexural mode and adsorbed masses that are either discretely attached or …

Shape effects of micromechanical cantilever sensor

H Hocheng, WH Weng, JH Chang - Measurement, 2012 - Elsevier
Microcantilever has been increasingly used as microsensor thanks to its fast response, low
cost and parallel implementation in large quantity. The principle of sensing lies in the …

Effect of gold coating on the Q-factor of a resonant cantilever

R Sandberg, K Mølhave, A Boisen… - … of Micromechanics and …, 2005 - iopscience.iop.org
The resonance frequency and the Q-factor of the fundamental and higher order flexural
modes of silicon dioxide microcantilevers have been characterized at different pressures …

Inertial mass sensing with low Q-factor vibrating microcantilevers

S Adhikari - Journal of Applied Physics, 2017 - pubs.aip.org
Mass sensing using micromechanical cantilever oscillators has been established as a
promising approach. The scientific principle underpinning this technique is the shift in the …

Ultra-sensitive minute mass sensing using a microcantilever virtually coupled with a virtual cantilever

Y Kasai, H Yabuno, Y Yamamoto, S Matsumoto - Sensors, 2020 - mdpi.com
Mass sensors based on the eigenmode shift of coupled cantilevers achieve much higher
sensitivity than those based on the single cantilever's eigenfrequency shift. In the former …