Ensuring desirable performance for piezoelectric microcantilever sensors constitutes a crucial research subject particularly for the applications such as detection of biochemical …
This article describes two approaches for sensitivity improvement of a micromachined silicon T-shaped cantilever resonator for mass sensing applications. In order to increase sensitivity …
Purpose–The purpose of this paper is to demonstrate the simplicity and versatility of micro‐ cantilever based sensors and to present the influence of added mass and stress on the …
LB Sharos, A Raman, S Crittenden… - Applied Physics …, 2004 - pubs.aip.org
We present a method to detect, with enhanced sensitivity, a target mass particle attached eccentrically to a microcantilever by measuring multiple three-dimensional modes in the …
JD Parkin, G Hähner - Review of Scientific Instruments, 2011 - pubs.aip.org
Micro-and nanocantilevers are increasingly employed as mass sensors. Most studies consider the first flexural mode and adsorbed masses that are either discretely attached or …
Microcantilever has been increasingly used as microsensor thanks to its fast response, low cost and parallel implementation in large quantity. The principle of sensing lies in the …
R Sandberg, K Mølhave, A Boisen… - … of Micromechanics and …, 2005 - iopscience.iop.org
The resonance frequency and the Q-factor of the fundamental and higher order flexural modes of silicon dioxide microcantilevers have been characterized at different pressures …
S Adhikari - Journal of Applied Physics, 2017 - pubs.aip.org
Mass sensing using micromechanical cantilever oscillators has been established as a promising approach. The scientific principle underpinning this technique is the shift in the …
Y Kasai, H Yabuno, Y Yamamoto, S Matsumoto - Sensors, 2020 - mdpi.com
Mass sensors based on the eigenmode shift of coupled cantilevers achieve much higher sensitivity than those based on the single cantilever's eigenfrequency shift. In the former …