Multilayer thickness determination using continuous wave THz spectroscopy

D Stanze, B Globisch, RJB Dietz… - IEEE Transactions …, 2014 - ieeexplore.ieee.org
We present a multilayer thickness measurement system based on optoelectronic continuous
wave THz spectroscopy. Due to its wide tuning range, high frequency resolution, and fast …

Terahertz multilayer thickness measurements: comparison of optoelectronic time and frequency domain systems

L Liebermeister, S Nellen, RB Kohlhaas… - Journal of Infrared …, 2021 - Springer
A bstract We compare a state-of-the-art terahertz (THz) time domain spectroscopy (TDS)
system and a novel optoelectronic frequency domain spectroscopy (FDS) system with …

Inline multilayer thickness sensing by using terahertz time-domain spectroscopy in reflection geometry

S Krimi, J Klier, M Herrmann… - … Waves (IRMMW-THz …, 2013 - ieeexplore.ieee.org
We present a novel approach to determine the individual layer thickness in a dielectric
multilayer sample using pulsed terahertz spectroscopy in reflection geometry. In a first step …

Continuous wave terahertz spectrometer as a noncontact thickness measuring device

R Wilk, F Breitfeld, M Mikulics, M Koch - Applied Optics, 2008 - opg.optica.org
We present a low cost terahertz (THz) spectrometer with coherent detection based on two
simple and robust dipole antennas driven by two laser diodes. The spectrometer covers …

Multifrequency continuous wave terahertz spectroscopy for absolute thickness determination

M Scheller, K Baaske, M Koch - Applied Physics Letters, 2010 - pubs.aip.org
We present a tunable multifrequency continuous wave terahertz spectrometer based on two
laser diodes, photoconductive antennas, and a coherent detection scheme. The system is …

Influence of system performance on layer thickness determination using terahertz time-domain spectroscopy

S Weber, L Liebelt, J Klier, T Pfeiffer, D Molter… - Journal of Infrared …, 2020 - Springer
The quality of coatings in industrial applications and scientific research with thicknesses in
the micrometer range is an important criterion for quality management. Therefore, thickness …

Sample thickness measurement with THz-TDS: Resolution and implications

CY Jen, C Richter - Journal of Infrared, Millimeter, and Terahertz Waves, 2014 - Springer
The accuracy of any measurement with terahertz time-domain spectroscopy (THz-TDS)
depends strongly on knowing and supplying the precise sample thickness when processing …

Fastest thickness measurements with a terahertz time-domain system based on electronically controlled optical sampling

M Yahyapour, A Jahn, K Dutzi, T Puppe, P Leisching… - Applied Sciences, 2019 - mdpi.com
Featured Application Terahertz thickness gauging of polymers and paint layers; one-
hundred percent inspection of plastic pipes; process control. Abstract We apply a fast …

Highly sensitive terahertz measurement of layer thickness using a two-cylinder waveguide sensor

M Theuer, R Beigang, D Grischkowsky - Applied Physics Letters, 2010 - pubs.aip.org
We report on the layer thickness determination on dielectrically coated metal cylinders using
terahertz (THz) time-domain spectroscopy. A considerable sensitivity increase of up to a …

Data extraction from terahertz time domain spectroscopy measurements

M Scheller - Journal of Infrared, Millimeter, and Terahertz Waves, 2014 - Springer
The potential of terahertz (THz) time domain spectroscopy to simultaneously determine the
complex dielectric parameters of materials and their geometrical thickness is of high interest …