The influence of temperature treatment on the formation of Ni-based Schottky diodes and ohmic contacts to n-6H-SiC

MG Rastegaeva, AN Andreev, AA Petrov… - Materials Science and …, 1997 - Elsevier
Nickel-based Schottky contacts to n-6H-SiC, subjected to various heat treatments, have
been studied by the capacitancevoltage technique, X-ray diffractometry and AES sputter …

Phase composition and electrical characteristics of nickel silicide Schottky contacts formed on 4H–SiC

I Nikitina, K Vassilevski, A Horsfall… - Semiconductor …, 2009 - iopscience.iop.org
Abstract 4H–SiC Schottky diodes with nickel silicide contacts were formed by consecutive
deposition of a titanium adhesion layer, 4 nm thick, and nickel, 100 nm thick, followed by …

The formation mechanism of Ni-based ohmic contacts to 4H-n-SiC

AV Kuchuk, K Gołaszewska, VP Kladko… - Materials Science …, 2012 - Trans Tech Publ
In this work the electrical properties of Ni and Ni2Si contacts on n-type 4H-SiC were
correlated to the strong structural changes at the contact/SiC interface upon annealing. We …

Improvement of high temperature stability of nickel contacts on n-type 6H–SiC

F Roccaforte, F La Via, V Raineri, L Calcagno… - Applied surface …, 2001 - Elsevier
The structural and electrical characterisation of nickel contacts on n-type silicon carbide was
performed to improve the ohmic behaviour at high temperatures. The formation of nickel …

TEM characterisation of silicide phase formation in Ni-based ohmic contacts to 4H n-SiC

M Wzorek, A Czerwinski, A Kuchuk, J Ratajczak… - Materials …, 2011 - jstage.jst.go.jp
Silicon carbide, due to its unique properties, is a material with a high application potential for
development of high power, high frequency and high temperature electronic devices …

Ohmic contacts on n-type and p-type cubic silicon carbide (3C-SiC) grown on silicon

M Spera, G Greco, RL Nigro, C Bongiorno… - Materials Science in …, 2019 - Elsevier
This paper is a report on Ohmic contacts on n-type and p-type type cubic silicon carbide (3C-
SiC) layers grown on silicon substrates. In particular, the morphological, electrical and …

Ohmic contact formation mechanism of Ni on -type 4H–SiC

SY Han, KH Kim, JK Kim, HW Jang, KH Lee… - Applied Physics …, 2001 - pubs.aip.org
Ohmic contact formation mechanism of Ni on n-type 4H–SiC is proposed by comparing the
electrical properties with microstructural change. The ohmic behavior was observed at …

Formation of low resistivity ohmic contacts to n-type 3C-SiC

J Wan, MA Capano, MR Melloch - Solid-State Electronics, 2002 - Elsevier
In this study, the dependence of nickel contacts to n-type 3C-SiC on anneal temperature is
characterized by the linear transmission line method. It is found that Ni contacts begin to …

Ni‐Based Ohmic Contacts to n‐Type 4H‐SiC: The Formation Mechanism and Thermal Stability

AV Kuchuk, P Borowicz, M Wzorek… - … in Condensed Matter …, 2016 - Wiley Online Library
The fabrication of low‐resistance and thermal stable ohmic contacts is important for
realization of reliable SiC devices. For the n‐type SiC, Ni‐based metallization is most …

Structural and electrical properties of Ni∕ Ti Schottky contacts on silicon carbide upon thermal annealing

F Roccaforte, F La Via, A Baeri, V Raineri… - Journal of applied …, 2004 - pubs.aip.org
The evolution of the structural and electrical properties of Ni/Ti/SiC Schottky contacts upon
thermal treatments was investigated. The samples were prepared by sequentially …