Development of dual-probe atomic force microscopy system using optical beam deflection sensors with obliquely incident laser beams

E Tsunemi, K Kobayashi, K Matsushige… - Review of Scientific …, 2011 - pubs.aip.org
We developed a dual-probe (DP) atomic force microscopy (AFM) system that has two
independently controlled probes. The deflection of each cantilever is measured by the …

Development of multi-environment dual-probe atomic force microscopy system using optical beam deflection sensors with vertically incident laser beams

E Tsunemi, K Kobayashi, N Oyabu, M Hirose… - Review of scientific …, 2013 - pubs.aip.org
We developed a dual-probe atomic force microscopy (DP-AFM) system with two cantilever
probes that can be operated in various environments such as in air, vacuum, and liquid. The …

Development of a multi-functional multi-probe atomic force microscope system with optical beam deflection method

P Li, Y Shao, K Xu, X Qiu - Review of Scientific Instruments, 2021 - pubs.aip.org
We developed a multi-probe atomic force microscope (MP-AFM) system with up to four
probes and realized various functions such as topography mapping, probing electrical …

Multi-probe atomic force microscopy using piezoelectric cantilevers

N Satoh, E Tsunemi, Y Miyato… - Japanese Journal of …, 2007 - iopscience.iop.org
We developed a multi-probe atomic force microscopy (AFM) system using piezoelectric thin
film (PZT) cantilevers. The use of self-sensing cantilevers with integrated deflection sensors …

Atomic force microscope with improved scan accuracy, scan speed, and optical vision

J Kwon, J Hong, YS Kim, DY Lee, K Lee… - Review of Scientific …, 2003 - pubs.aip.org
The atomic force microscope AFM is a powerful instrument in nanometer-scale science and
technology. Since its invention in 1986, 1 AFM has evolved significantly, refining its …

Novel stationary-sample atomic force microscope with beam-tracking lens

PS Jung, DR Yaniv - Electronics Letters, 1993 - IET
An atomic force microscope with a stationary sample and a scanning cantilever using an
optical lever method is demonstrated for the first time. The cantilever tip is translated to …

Multi-probe atomic force microscopy with optical beam deflection method

E Tsunemi, N Satoh, Y Miyato… - Japanese Journal of …, 2007 - iopscience.iop.org
We developed a multi-probe atomic force microscope (AFM) having two AFM cantilevers
independently controlled using the optical beam deflection method. We succeeded in …

Development of low temperature atomic force microscopy with an optical beam deflection system capable of simultaneously detecting the lateral and vertical forces

E Arima, H Wen, Y Naitoh, YJ Li… - Review of Scientific …, 2016 - pubs.aip.org
The atomic force microscopy (AFM) is a very important tool for imaging and investigating the
complex force interactions on sample surfaces with high spatial resolution. In the AFM, two …

Array detector for the atomic force microscope

TE Schäffer, M Richter, MB Viani - Applied Physics Letters, 2000 - pubs.aip.org
We present a method for measuring the deflection of the optical beam in an atomic force
microscope (AFM) that yields an increased signal-to-noise ratio, compared to the …

Compensation of cross talk in the optical lever deflection method used in atomic force microscopy

S Fujisawa, H Ogiso - Review of scientific instruments, 2003 - pubs.aip.org
Most atomic force microscopes employ the optical lever deflection method using a quadrant
photodetector as the displacement sensor of the cantilever, which enables it to detect lateral …