Anatase-phase titanium oxide by low temperature oxidation of metallic Ti thin film

KS Lee, IS Park - Scripta materialia, 2003 - Elsevier
It was found that metallic Ti film oxidized for 3 h at 683 K in water vapor with oxygen as the
carrier gas was changed into anatase-phase TiO2 with around 10 nm sized nanocrystals …

Preparation and characterization of TiO2 thin film by thermal oxidation of sputtered Ti film

B Zhou, X Jiang, R Shen, AV Rogachev - Materials Science in …, 2013 - Elsevier
Titanium dioxide (TiO2) thin films were successfully prepared on quartz substrate by thermal
oxidation of sputtered titanium film in air. The structure, composition, morphology and optical …

Crystallization behaviors of TiO2 films derived from thermal oxidation of evaporated and sputtered titanium films

Y Zhang, X Ma, P Chen, D Yang - Journal of alloys and compounds, 2009 - Elsevier
TiO2 films were formed by thermal oxidation of electron-beam-evaporated and magnetron-
sputtered titanium (Ti) films. It was found that the TiO2 films formed by thermal oxidation of …

Influence of Ti film thickness and oxidation temperature on TiO2 thin film formation via thermal oxidation of sputtered Ti film

SD Sartale, AA Ansari, SJ Rezvani - Materials science in semiconductor …, 2013 - Elsevier
Single-phase rutile TiO 2 films with good crystallinity were obtained by thermal oxidation of
sputtered Ti films on Si and quartz substrates. The influence of the Ti film thickness on …

Determination of nanoscale titanium oxide thin film phase composition using X-ray photoelectron spectroscopy valence band analysis

DNG Krishna, RP George, J Philip - Thin Solid Films, 2019 - Elsevier
The phase compositions of nanoscale thick titania films on the titanium were determined
using X-ray photoelectron spectroscopy valence band analysis for the first time, by …

Structural evolution and optical properties of thin films prepared by thermal oxidation of sputtered Ti films

CC Ting, SY Chen, DM Liu - Journal of Applied Physics, 2000 - pubs.aip.org
A dense rutile TiO 2 thin film was synthesized by the thermal oxidation of a sputtered
titanium metal film in ambient air. The effects on optical properties of TiO 2 films of the crystal …

Formation of Anatase on Commercially Pure Ti by Two-Step Thermal Oxidation Using N2–CO Gas

N Umetsu, S Sado, K Ueda, K Tajima… - Materials …, 2013 - jstage.jst.go.jp
Titanium (Ti) and its alloys have excellent properties such as high corrosion resistance and
an excellent balance of strength and ductility. They have therefore been used in aerospace …

Investigation of thermally induced changes on structure, morphology and stoichiometry of sputter deposited titanium oxide thin films

S Jana, AK Debnath, P Veerender, J Bahadur, J Kishor… - Thin Solid Films, 2022 - Elsevier
We report here tailoring the properties of amorphous titanium oxide (a-TiO x) thin films by
changing substrate heating as well as post-annealing. The a-TiO x thin films have been …

Preparation of porous anatase titania film

G Tang, R Zhang, Y Yan, Z Zhu - Materials Letters, 2004 - Elsevier
A porous anatase titania film was prepared by a composite oxidation method on pure
titanium surfaces, which was in a combination of pre-anodic oxidation and micro-arc …

Hydrothermal synthesis of anatase-type TiO2 films on Ti and Ti–Nb substrates

M Ueda, Y Uchibayashi, S Otsuka-Yao-Matsuo… - Journal of Alloys and …, 2008 - Elsevier
The hydrothermal synthesis of anatase-type TiO2 films on Ti and Ti–Nb substrates was
examined with a focus on crystallinity and surface morphology of the films. The substrates …