In this paper, we report on the main aspects of the design, fabrication, and performance of a
microelectromechanical system constituted by a mechanical submicrometer scale resonator …

This letter presents the design, fabrication, and demonstration of a CMOS/
microelectromechanical system (MEMS) electrostatically self-excited resonator based on a …

Micro/nanomechanical resonators have been designed and fabricated with the aim to be
used as distributed mass sensors for in situ measurement of the thickness of ultra-thin …

We present a microelectromechanical system, in which a silicon beam is attached to a comb-
drive actuator, which is used to tune the tension in the silicon beam and thus its resonance …

This paper describes an electrostatic charge sensor based on a microelectromechanical
systems (MEMS) resonator with dual micro-levers to improve sensitivity. The device …

A well-known example of a resonant sensor is the mass-sensitive quarz crystal
microbalance (QCM) used, eg, in deposition equipment to monitor films thickness. The …

In this paper, we present the design, fabrication and characterization of the CMOS
micromachined cantilevers for mass sensing in the femtogram range. The cantilevers …

Micro-and nanoelectromechanical systems (MEMS/NEMS) have a high potential for mass
sensing application. By miniaturization of the dimensions, higher and higher sensitivities can …

A new out-of-plane resonant micro-machined accelerometer has been designed, modelled
and fabricated. The sensing principle is based on the variation of the electrostatic stiffness of …

Microelectromechanical Systems (MEMS)(1–2) has come into existence only in the last
decade. Microcantilevers are the most simplified MEMS based devices. Diverse applications …