J Garnaes, N Kofod, A Kühle, C Nielsen, K Dirscherl… - Precision …, 2003 - Elsevier
In this paper we present a method for the vertical calibration of a metrological atomic force microscope (AFM), which can be applied to most AFM systems with distance sensors. A …
V Korpelainen, J Seppä… - Journal of Micro …, 2012 - spiedigitallibrary.org
Gratings and step height standards are useful transfer standards for lateral and vertical length scale calibration of atomic force microscopes (AFMs). In order to have traceability to …
SH Wang, G Xu, SL Tan - Ninth International Symposium on …, 2008 - spiedigitallibrary.org
The rapid advancement of nanotechnology is increasingly demanding measurements carried out at nano-scale be more accurate, comparable and traceable to the international …
NG Orji, RG Dixson, J Fu, TV Vorburger - Wear, 2004 - Elsevier
The atomic force microscope (AFM) increasingly being used as a metrology tool in the semiconductor industry where the features measured are at the nanometer level and …
J Wu, X Cai, J Wei, C Wang, Y Zhou, K Sun - Photonics, 2023 - mdpi.com
With the rapid and continuous development of nanomanufacturing technology, the demands for both large range and high precision metrology of structured surfaces are becoming …
Reliability of measurement is a crucial element of both research and industry. Metrological traceability to the SI unit metre guarantees commensurate units, also at nanometre range. In …
J Haycocks, K Jackson - Measurement Science and Technology, 2007 - iopscience.iop.org
Step height standards are widely used for the calibration of the z-axis scale of scanning probe microscopes. NPL, in common with a number of other national measurement …
Abstract/The Atomic Force Microscope (AFM) is a widely used, high resolution surface imaging instrument. Making accurate nanometer-scale measurements with an AFM requires …
In recent years, there has been growth in the development of high-speed AFMs, which offer the possibility of video rate scanning and long-range scanning over several hundred …