[HTML][HTML] Metrological atomic force microscope for calibrating nano-scale step height standards

S Wang - Measurement: Sensors, 2021 - Elsevier
In this paper, we described a metrological AFM in order to calibrate step height standards
used as transfer artefacts for commercial AFMs. With X, Y and Z axes laser displacement …

Calibration of step heights and roughness measurements with atomic force microscopes

J Garnaes, N Kofod, A Kühle, C Nielsen, K Dirscherl… - Precision …, 2003 - Elsevier
In this paper we present a method for the vertical calibration of a metrological atomic force
microscope (AFM), which can be applied to most AFM systems with distance sensors. A …

Measurement strategies and uncertainty estimations for pitch and step height calibrations by metrological atomic force microscope

V Korpelainen, J Seppä… - Journal of Micro …, 2012 - spiedigitallibrary.org
Gratings and step height standards are useful transfer standards for lateral and vertical
length scale calibration of atomic force microscopes (AFMs). In order to have traceability to …

Development of a metrological atomic force microscope for nano-scale standards calibration

SH Wang, G Xu, SL Tan - Ninth International Symposium on …, 2008 - spiedigitallibrary.org
The rapid advancement of nanotechnology is increasingly demanding measurements
carried out at nano-scale be more accurate, comparable and traceable to the international …

Traceable pico-meter level step height metrology

NG Orji, RG Dixson, J Fu, TV Vorburger - Wear, 2004 - Elsevier
The atomic force microscope (AFM) increasingly being used as a metrology tool in the
semiconductor industry where the features measured are at the nanometer level and …

A measurement system with high precision and large range for structured surface metrology based on atomic force microscope

J Wu, X Cai, J Wei, C Wang, Y Zhou, K Sun - Photonics, 2023 - mdpi.com
With the rapid and continuous development of nanomanufacturing technology, the demands
for both large range and high precision metrology of structured surfaces are becoming …

Traceability for nanometre scale measurements: Atomic force microscopes in dimensional nanometrology

V Korpelainen - 2014 - cris.vtt.fi
Reliability of measurement is a crucial element of both research and industry. Metrological
traceability to the SI unit metre guarantees commensurate units, also at nanometre range. In …

Detecting and addressing the surface following errors in the calibration of step heights by atomic force microscopy

J Haycocks, K Jackson - Measurement Science and Technology, 2007 - iopscience.iop.org
Step height standards are widely used for the calibration of the z-axis scale of scanning
probe microscopes. NPL, in common with a number of other national measurement …

[PDF][PDF] A 3D translation stage for metrological AFM

C Werner - 2010 - research.tue.nl
Abstract/The Atomic Force Microscope (AFM) is a widely used, high resolution surface
imaging instrument. Making accurate nanometer-scale measurements with an AFM requires …

Bringing real-time traceability to high-speed atomic force microscopy

E Heaps, A Yacoot, H Dongmo, L Picco… - Measurement …, 2020 - iopscience.iop.org
In recent years, there has been growth in the development of high-speed AFMs, which offer
the possibility of video rate scanning and long-range scanning over several hundred …