Sc_XAl_-XN is a promising material to expand the application range of nitride materials,
since scandium increases the piezoelectric constants while retaining the crystalline wurtzite …

In this paper, we map the ferroelectric properties of 22% and 30% scandium-doped
aluminum nitride (ScAlN) thin films with the goal to engineer low coercive fields for low …

The piezoelectric properties of wurtzite aluminium nitride (w-AlN) are enhanced by alloying
with scandium (Sc), thus offering superior properties for applications in micro electro …

Scandium aluminum nitride (ScxAl1-xN) is a promising material for sensor applications as it
exhibits enhanced piezoelectric properties compared to pristine AlN while maintaining other …

In order to overcome the shortcomings of AlN piezoelectric thin films such as low
piezoelectric coefficient and low electromechanical coupling coefficientrealize, Sc x Al 1− x …

Piezoelectric wurtzite Sc x Al 1− x N (x= 0, 0.1, 0.2, 0.3) thin films were epitaxially grown by
reactive magnetron co-sputtering from elemental Sc and Al targets. Al 2 O 3 (0001) wafers …

Aluminum scandium nitride (AlScN) has emerged as a highly promising material for high-
temperature applications due to its robust piezoelectric, ferroelectric, and dielectric …

In this work, we systematically studied the deposition, characterization, and crystal structure
modeling of ScAlN thin film. Measurements of the piezoelectric device's relevant material …

Aluminium scandium nitride (Al 1-x Sc x N) with its strongly enhanced piezoelectric
response is the upcoming piezoelectric material of choice in next generation RF filters …

Al x Sc 1− x N films were deposited by reactive pulse magnetron co-sputtering from
aluminum and scandium targets without additional substrate heating at deposition rates …