A novel atomic force microscope (AFM) head based on white light interference (WLI) is
developed for nanoscale surface measurement. In this head, instead of an optical beam …

The dynamic characteristics of an atomic force probe are important for rapid and accurate
measurement in white light interference (WLI) based atomic force microscope (AFM). The tip …

Novel atomic force probe scanning microscopy combined with white light interference is
proposed, in which the deflection of the cantilever is obtained by measuring the movement …

Probe calibration is the basis of accurate atomic force microscope (AFM) measurement. In
white light interference based AFM (WLI-AFM), the relationship between the vertical …

In white light interference based atomic force microscopy (WLIAFM), the vertical
displacement of the probe is obtained by zero-order fringe positioning on the probe …

A hybrid atomic force microscopic (AFM) measurement system combined with white light
scanning interferometry for micro/nanometer dimensional measurement is developed. The …

Characterizations of nano-scale structures using conventional stylus profilometer and optical
microscopy are respectively restricted by tip radius and diffraction limit. Atomic force …

In this paper, a large-range atomic force microscope (AFM) measuring system is developed
for optical free form surface characterization. Based on the self-sensing tuning fork probe, a …

A compact and two-dimensional atomic force microscope (AFM) using an orthogonal sample
scanner, a calibrated homodyne laser interferometer and a commercial AFM head was …

We developed a metrological atomic force microscope (MAFM) using a large range
scanning dual stage and evaluated the performance in the measurement of lateral …