In recent years, there has been growth in the development of high-speed AFMs, which offer
the possibility of video rate scanning and long-range scanning over several hundred …

The rapid advancement of nanotechnology is increasingly demanding measurements
carried out at nano-scale be more accurate, comparable and traceable to the international …

Abstract/The Atomic Force Microscope (AFM) is a widely used, high resolution surface
imaging instrument. Making accurate nanometer-scale measurements with an AFM requires …

The most common readout technique used in atomic force microscopy (AFM) is based on
optical beam deflection (OBD), which relies on monitoring deflection of the cantilever probe …

In this paper, we described a metrological AFM in order to calibrate step height standards
used as transfer artefacts for commercial AFMs. With X, Y and Z axes laser displacement …

For manufacturing at the nanometre scale a method for rapid and accurate measurement of
the resultant functional devices is required. Although atomic force microscopy (AFM) has the …

A Metrological Atomic Force Microscope (MAFM) has been constructed for the traceable
calibration of transfer standards for scanning probe microscopy. It uses optical interferometry …

An atomic force microscope with a high-resolution three-axis laser interferometer for real-
time correction of distorted topographic images has been constructed and investigated. With …

Within the Dutch standards laboratory (NMi Van Swinden Laboratorium) a traceable atomic
force microscope (AFM) is currently being developed where we aim at a measurement …

Low measurement speed remains a major shortcoming of the scanning probe microscopic
technique. It not only leads to a low measurement throughput, but a significant measurement …