With the rapid and continuous development of nanomanufacturing technology, the demands
for both large range and high precision metrology of structured surfaces are becoming …

Characterizations of nano-scale structures using conventional stylus profilometer and optical
microscopy are respectively restricted by tip radius and diffraction limit. Atomic force …

A metrological atomic force microscope (AFM) adapting compact measuring head for the
micro-nano dimensional measurement is introduced in this paper. Based on a novel self …

In this paper, we described a metrological AFM in order to calibrate step height standards
used as transfer artefacts for commercial AFMs. With X, Y and Z axes laser displacement …

In this paper, a large-range atomic force microscope (AFM) measuring system is developed
for optical free form surface characterization. Based on the self-sensing tuning fork probe, a …

The rapid advancement of nanotechnology is increasingly demanding measurements
carried out at nano-scale be more accurate, comparable and traceable to the international …

Low measurement speed remains a major shortcoming of the scanning probe microscopic
technique. It not only leads to a low measurement throughput, but a significant measurement …

Recently metrological atomic force microscopes (metrological AFMs) have been used for
surface roughness measurements. The National Metrology Institute of Japan (NMIJ), AIST …

Nanoscale measurement is an essential task of nanomanufacturing, and measurement
traceability is a fundamental aspect of nanoscale measurement. High-precision nanoscale …

Our prototype atomic force microscope (AFM) uses a piezoelectric tube to scan a probe tip
over a sample surface, while a PC-based digital controller maintains a constant tip–sample …