Sequential position readout from a microfabricated array of eight cantilever-type sensors
(silicon technology) is demonstrated. In comparison with single sensors we find that …

We have built and operated a novel setup for the characterization and identification of gases
or vapors based on sequential position readout via a beam-deflection technique from a …

A novel chemical sensor based on a micromechanical array of silicon cantilevers is
presented. Chemical reactions are transduced by sensitization of cantilevers with coatings …

We present a chemical sensor based on a microfabricated array of eight silicon cantilevers
actuated at their resonance-frequency and functionalized by polymer coatings. The …

An optical readout technique has been developed for real-time monitoring of the profile of
microcantilever arrays for sensing applications. The technique is based on the automated …

The advent of inexpensive, mass-produced microcantilevers promises to bring about a
revolution in the field of chemical and physical sensor design. In this paper, a novel class of …

Miniaturized microfabricated sensors have enormous potential in gas detection, biochemical
analysis, medical applications, quality and process control, and product authenticity issues …

A surface-micromachined micro-electro-mechanical-system (MEMS) process has been used
to demonstrate multiple-input chemical sensing using selectively coated cantilever arrays …

We present quantitative and qualitative detection of analyte vapors using a microfabricated
silicon cantilever array. To observe transduction of physical and chemical processes into …

A multiple-point deflection technique has been developed for the instant measurement of
microcantilever curvature. Eight light-emitting diodes are focused on various positions of a …