Photoforming refers to optical forming methods such as stereolithography, photomask
layering, and the 1H process. In these processes, a special liquid resin is used as forming …

抄録 The photoforming process is one of the optical forming methods used to produce plastic
models. It has unique features such as the ability to form various objects, with few restrictions …

This research work deals with the methods for manufacturing high aspect ratio micro
mechanical parts by using UV photopolymer. In the first method, polymer structures are …

Up to now it is possible to etch through the whole wafer or in a defined depth, but not with
the same etching process. Structures with a defined depth had to be produced with a second …

A patterning machine capable of 5* 10/sup 4/pixel per second random access scanning has
been developed as a tool for laser microchemical fabrication of three-dimensional parts. The …

A technique for three-dimensional micro fabrication using stereo lithography is proposed. It
is called the IH process (integrated hardened polymer stereo lithography) and is suitable for …

Movable microstructures were made by the use of two-photon three-dimensional (3D)
microfabrication with submicron resolution beyond the diffraction limit of light. In our method …

A new laser projection system is presented within this paper. The working principle and the
main components are discussed. A cost effective and small sized laser projection system …

Novel surface-micromachined focusing mirrors have been designed, fabricated, and tested.
The mirrors are constructed from concentric rings of polysilicon and gold, and connected by …

A polymide-based process for the fabrication of high-aspect ratio microstructures is
presented. The process exploits the sharp-sidewall characteristics of photosensitive …