In this paper, a large-range atomic force microscope (AFM) measuring system is developed
for optical free form surface characterization. Based on the self-sensing tuning fork probe, a …

Characterizations of nano-scale structures using conventional stylus profilometer and optical
microscopy are respectively restricted by tip radius and diffraction limit. Atomic force …

Factors such as sample deformation, which comes from the applied force, and the probe
shape, which results in image dilation, lead to the errors in the measurement of roughness …

Influences of tip radius and sampling interval on applying atomic force microscopy (AFM) in
quantitative surface evaluations are investigated by numerical simulations and experiments …

With the rapid and continuous development of nanomanufacturing technology, the demands
for both large range and high precision metrology of structured surfaces are becoming …

抄録 Calibration technology of profile surface roughness (Ra: from 0.2 nm to 100 nm) by
using an atomic force microscope with differential laser interferometers (DLI-AFM) has been …

A metrological atomic force microscope (AFM) adapting compact measuring head for the
micro-nano dimensional measurement is introduced in this paper. Based on a novel self …

A metrological large range atomic force microscope (Met. LR-AFM) has been set up and
improved over the past years at Physikalisch-Technische Bundesanstalt (PTB). Being …

Atomic force microscope (AFM) is commonly used for three-dimensional characterization of
the surface morphology of structures at nanoscale, but the “Inflation effect” of the tip is an …

This paper presents a high quality-factor (Q-factor) quartz tuning fork (QTF) with a glass
probe attached, used in frequency modulation tapping mode atomic force microscopy (AFM) …