Fabrication of seamless roller mold with excimer laser direct writing technology

YC Lee, PC Chen, HY Lin - 2009 4th IEEE International …, 2009 - ieeexplore.ieee.org
This paper presents a new method for fabricating a seamless roller mold with micrometer-
scaled features based on laser direct writing approach. In the process, a glass roller is first …

Fabrication of seamless roller molds using step-and-rotate curved surface photolithography and application on micro-lens array optic film

WH Li, HW Chen, YW Hu, YC Lee… - 2011 6th IEEE …, 2011 - ieeexplore.ieee.org
This paper describes an innovative approach for fabricating seamless roller molds based on
conventional photolithography. The fabricated seamless roller molds are then applied in a …

Fabrication of seamless patterns onto metal rollers by photolithography

HW Chen, YC Lee, FB Hsiao - 2010 IEEE 5th International …, 2010 - ieeexplore.ieee.org
This paper develops a novel method to fabricate seamless and complicated patterns of
microstructures onto the cylindrical surface of a metal roller. This patterned metal roller can …

Roller imprinting based on focus infrared heating

CH Chen, YC Lee, CD Chen, SJ Lai… - 2008 3rd IEEE …, 2008 - ieeexplore.ieee.org
In this paper we report the development of a new roller imprinting method which is capable
of transferring patterns with line-width down to few hundreds nm from a silicon mold to a …

Fabrication of metal roller mold with submicrometer feature size using contact printing photolithography technique

KF Huang, YC Lee - Journal of Vacuum Science & Technology B, 2013 - pubs.aip.org
This paper presents an innovative approach for directly forming surface microstructures at
submicrometer scale on the cylindrical surface of a metal roller. This roller can then serve as …

Fabrication of seamless roller mold with 3D micropatterns using inner curved surface photolithography

SW Tsai, PY Chen, SR Huang, YC Lee - Microelectronic Engineering, 2016 - Elsevier
Continuous roller imprinting is one of the most promising means of fabricating micro/nano
structures over a large area. However, the fabrication of roller molds with seamless and …

Dip coating cooperated with stepped rotating lithography to fabricate rigid microstructures onto a metal roller

JT Wu, HC Lai, SY Yang, TC Huang, SH Wu - Microelectronic engineering, 2010 - Elsevier
In recent years, roller imprinting has been considered as the most efficient technique for
replicating microstructures onto polymeric substrate. However, the preparation of roller is still …

Micro device mould fabrication based on two-photon polymerization and electroforming

J Ding, Z Zhai, J He, J Li, X Wang… - 2010 IEEE 5th …, 2010 - ieeexplore.ieee.org
A novel method of the micro device mould fabrication is reported, which combine the
femtosecond two-photon polymerization and micro electroforming. As example of the results …

Laser-assisted direct roller imprinting of large-area microstructured optical surfaces

K Nagato, K Takahashi, Y Yajima… - Microsystems & …, 2024 - nature.com
In this study, a high-throughput fabrication method called laser-assisted direct roller
imprinting (LADRI) was developed to lower the cost of nanoimprinting large-area polymer …

Micro-machining using photo-polymerization and metal jet deposition

K Yamaguchi - … on Micromechanics and Human Science (Cat …, 1997 - ieeexplore.ieee.org
This research work deals with the development of a simple and practical method for
manufacturing micromechanical parts using different methods. The first method is a mask …