Characterizations of nano-scale structures using conventional stylus profilometer and optical
microscopy are respectively restricted by tip radius and diffraction limit. Atomic force …

In this paper, a large-range atomic force microscope (AFM) measuring system is developed
for optical free form surface characterization. Based on the self-sensing tuning fork probe, a …

With the rapid and continuous development of nanomanufacturing technology, the demands
for both large range and high precision metrology of structured surfaces are becoming …

Atomic force microscope (AFM) is commonly used for three-dimensional characterization of
the surface morphology of structures at nanoscale, but the “Inflation effect” of the tip is an …

A compact and two-dimensional atomic force microscope (AFM) using an orthogonal sample
scanner, a calibrated homodyne laser interferometer and a commercial AFM head was …

A metrological large range atomic force microscope (Met. LR-AFM) has been set up and
improved over the past years at Physikalisch-Technische Bundesanstalt (PTB). Being …

A novel atomic force microscope (AFM) head based on white light interference (WLI) is
developed for nanoscale surface measurement. In this head, instead of an optical beam …

This work reports on the measurement at the nanoscale using local probe microscopy
techniques, primarily atomic force microscopy. Recent applications using the atomic force …

For manufacturing at the nanometre scale a method for rapid and accurate measurement of
the resultant functional devices is required. Although atomic force microscopy (AFM) has the …

The measurement resolution of an atomic force microscope (AFM) is largely dependent on
the radius of the tip. Meanwhile, when using AFM to study nanoscale surface properties, the …