Probe calibration is the basis of accurate atomic force microscope (AFM) measurement. In
white light interference based AFM (WLI-AFM), the relationship between the vertical …

A novel atomic force microscope (AFM) head based on white light interference (WLI) is
developed for nanoscale surface measurement. In this head, instead of an optical beam …

The dynamic characteristics of an atomic force probe are important for rapid and accurate
measurement in white light interference (WLI) based atomic force microscope (AFM). The tip …

In white light interference based atomic force microscopy (WLIAFM), the vertical
displacement of the probe is obtained by zero-order fringe positioning on the probe …

In this paper, a nondestructive method for the normal and lateral sensitivity calibrations of
the optical lever in atomic force microscope (AFM) is presented. The practical application of …

Novel atomic force probe scanning microscopy combined with white light interference is
proposed, in which the deflection of the cantilever is obtained by measuring the movement …

The linewidth or critical dimension (CD) of a nanoscale line pattern is calibrated using a
metrological atomic force microscope with a tip-tilting mechanism (tilting-mAFM). The tilting …

A hybrid atomic force microscopic (AFM) measurement system combined with white light
scanning interferometry for micro/nanometer dimensional measurement is developed. The …

We developed a compact and light displacement sensor applicable to systems that require
wide range motions of its sensing device. The proposed sensor utilized the optical pickup …

We developed a metrological atomic force microscope (MAFM) using a large range
scanning dual stage and evaluated the performance in the measurement of lateral …