A simple linear electromechanical model for an electrostatically driven resonating cantilever
is derived. The model has been developed in order to determine dynamic quantities such as …

Miniaturization of cantilever dimensions will increase both the mass and spatial resolution of
a resonating cantilever-based mass sensor, which monitors the mass change of the …

An analytical expression relating mass and position of a particle attached on a cantilever to
the resulting change in cantilever resonant frequency is derived. Theoretically, the position …

We present a theoretical analysis of the vibrating resonator in cantilever and bridge
configurations operating as ultrasensitive mass sensors. An exact solution of the problem …

This paper investigates an alternative mass-sensing technique based on nonlinear micro-/
nanoelectromechanical resonant sensors. The proposed approach takes advantage of multi …

In this paper, we report on the main aspects of the design, fabrication, and performance of a
microelectromechanical system constituted by a mechanical submicrometer scale resonator …

Response characteristics of a microcantilever, such as resonant frequency, amplitude,
phase and quality factor, can be used for absolute pressure measurements in the range of …

By positioning a single gold particle at different locations along the length axis on a
cantilever based mass sensor, we have investigated the effect of mass position on the mass …

We present a method for microcantilever resonant frequency detection. We measure the
direct current from an intermittent contact once every vibration cycle between the conducting …

Micro/nanomechanical resonators have been designed and fabricated with the aim to be
used as distributed mass sensors for in situ measurement of the thickness of ultra-thin …