An atomic force microscopy (AFM) tip characterizer with measurement ranges from 7.7 nm to
131 nm was developed using Si/SiO2 multilayers. This characterizer was constructed with …

A new tip characterizer based on the fabrication of multilayer thin films for atomic force
microscopy (AFM) was developed to analyze the effective tip shape while in use. The …

A new type of AFM tip characterizer used for characterizing nanostructures in the 10 nm to
100 nm range was developed. The characterizer was fabricated by preferential etching the …

Atomic force microscope (AFM) is commonly used for three-dimensional characterization of
the surface morphology of structures at nanoscale, but the “Inflation effect” of the tip is an …

We propose a novel fabrication process for twin probes of an atomic force microscope (AFM)
that consist of a silicon dual tip with a narrow gap. The dual tip with a tetrahedral shape …

We developed a fabrication process of narrow-gapped twin nano-tips for atomic force
microscopy (AFM) dual probes. A tetrahedral dual tip consisting of an inclined crystalline Si …

A tip characterizer for atomic force microscopy (AFM) was developed based on the
fabrication of multilayer thin films. Comb-shaped line and space (LS) and wedge-shaped …

Different fabrication technologies for atomic force microscopy (AFM) probes have been
investigated, emphasizing the fabrication of versatile tip shapes, which can be integrated …

In this paper, we report a new method of fabricating AFM (Atomic Force Microscope) probe
tips at low cost. Most of previous AFM probe tips have been made of SOI wafers using back …

This paper discusses the scanning performance of a trimmed atomic force microscope
(AFM) tip. A standard tip was trimmed by focused ion beam (FIB) sputtering to achieve a …