In order to enhance the lateral force sensitivity of atomic force microscopy (AFM) to detect
atomic or molecular scale interaction, two types of force sensors were fabricated by …

A novel atomic force microscope (AFM) has been developed. Unlike conventional AFM
systems, its cantilever and tip were set up in the X direction with respect to the sample. It can …

The atomic force microscopy (AFM) is a very important tool for imaging and investigating the
complex force interactions on sample surfaces with high spatial resolution. In the AFM, two …

Abstract Development of micro machined cantilever and optical lever detection system has
greatly facilitated the operation of atomic force microscopy. However, since the detection …

An atomic force microscope (AFM) with the function of measuring both bend θ x and twist θ y
of a rectangular‐shaped cantilever, with its longitudinal axis pointing in the y direction, was …

We developed a multi-probe atomic force microscopy (AFM) system using piezoelectric thin
film (PZT) cantilevers. The use of self-sensing cantilevers with integrated deflection sensors …

We developed a multi-probe atomic force microscope (AFM) having two AFM cantilevers
independently controlled using the optical beam deflection method. We succeeded in …

A novel calibration technique has been developed for lateral force microscopy (LFM).
Typically, special preparation of the atomic force microscope (AFM) cantilever or a substrate …

A novel calibration method is proposed for determining lateral forces in atomic force
microscopy (AFM), by introducing an angle conversion factor, which is defined as the ratio of …

We have developed a new versatile scanning electron microscope (SEM)-atomic force
microscope (AFM) system capable of simultaneous SEM and AFM operation. The system …