Gratings and step height standards are useful transfer standards for lateral and vertical
length scale calibration of atomic force microscopes (AFMs). In order to have traceability to …

The National Institute of Standards and Technology (NIST), Advanced Surface Microscopy
(ASM), and the National Metrology Centre (NMC) of the Agency for Science, Technology …

AFMs are increasingly used in the semiconductor industry as tools for sub-micrometer
dimensional metrology. The scale of an AFM must be calibrated in order to perform accurate …

Because atomic force microscopes (AFMs) are capable of generating three dimensional
images with nanometer level resolution, these instruments are being increasingly used in …

The National Institute of Standards and Technology (NIST), Advanced Surface Microscopy
(ASM), and the National Metrology Centre (NMC) of the Agency for Science, Technology …

Reliability of measurement is a crucial element of both research and industry. Metrological
traceability to the SI unit metre guarantees commensurate units, also at nanometre range. In …

Atomic force microscopes (AFMs) generate three dimensional images with nanometer level
resolution and, consequently, are used in the semiconductor industry as tools for sub …

The rapid advancement of nanotechnology is increasingly demanding measurements
carried out at nano-scale be more accurate, comparable and traceable to the international …

Microscope calibration standards in nanometrology were calibrated using a metrological
atomic force microscope (metrological AFM) and the validity of calibrated values was shown …

An interferometrically traceable metrological atomic force microscope (IT-MAFM) has been
developed at MIKES. It can be used for traceable atomic force microscope (AFM) …