Step height standards are widely used for the calibration of the z-axis scale of scanning
probe microscopes. NPL, in common with a number of other national measurement …

In this paper we present a method for the vertical calibration of a metrological atomic force
microscope (AFM), which can be applied to most AFM systems with distance sensors. A …

We propose a standard stepped sample and specify a procedure for determining the step
height for height‐scale calibration of atomic force microscopy (AFM) instruments on the …

Atomic force microscopes (AFMs), which generate three dimensional images with
nanometer level resolution, are increasingly being used as tools for sub-micrometer …

Atomic force microscopes (AFMs) are potentially capable of dimensional metrology with
nanometer scale accuracy. Feature width measurements, however, can be severely affected …

A Metrological Atomic Force Microscope (MAFM) has been constructed for the traceable
calibration of transfer standards for scanning probe microscopy. It uses optical interferometry …

Atomic force microscope (AFM) measurements are being used increasingly for metrological
applications such as semiconductor process development and control. Common types of …

The National Institute of Standards and Technology (NIST) has a multifaceted program in
atomic force microscope (AFM) dimensional metrology. There are two major instruments …

The atomic force microscope (AFM) increasingly being used as a metrology tool in the
semiconductor industry where the features measured are at the nanometer level and …

The decreasing feature dimensions required in the semiconductor manufacturing industry
are placing ever increasing demands upon metrology instruments. Atomic force …