Atomic force microscope (AFM) is commonly used for three-dimensional characterization of
the surface morphology of structures at nanoscale, but the “Inflation effect” of the tip is an …

Atomic force microscopes (AFMs) are potentially capable of dimensional metrology with
nanometer scale accuracy. Feature width measurements, however, can be severely affected …

Metrological atomic force microscopes are widely used in national metrology institutes for
measuring step height, lateral pitch and surface roughness. However, the maximum …

A new tip characterizer based on the fabrication of multilayer thin films for atomic force
microscopy (AFM) was developed to analyze the effective tip shape while in use. The …

A tip characterizer for atomic force microscopy (AFM) was developed based on the
fabrication of multilayer thin films. Comb-shaped line and space (LS) and wedge-shaped …

In atomic force microscopy (AFM) metrology, the tip is a key source of uncertainty. Images
taken with an AFM show a change in feature width and shape that depends on tip geometry …

Atomic force microscopy (AFM) is increasingly used in the semiconductor industry as a
versatile monitoring tool for highly critical lithography and etching process steps …

We present nanometer-scale physical structures and analysis algorithms for characterizing
tip width and shape for critical dimension atomic force microscopy (CD-AFM). Automated CD …

An atomic force microscopy (AFM) tip characterizer with measurement ranges from 7.7 nm to
131 nm was developed using Si/SiO2 multilayers. This characterizer was constructed with …

In this paper, we explore the sensitivity of three-dimensional atomic force microscopy to
incremental variation in the sidewall angle of near-vertical features. Measurement results …