In this paper we present a method for the vertical calibration of a metrological atomic force
microscope (AFM), which can be applied to most AFM systems with distance sensors. A …

The calibration service of profile surface roughness by using a metrological atomic force
microscope is now available at National Metrology Institute of Japan (NMIJ), AIST. The …

A Metrological Atomic Force Microscope (MAFM) has been constructed for the traceable
calibration of transfer standards for scanning probe microscopy. It uses optical interferometry …

Abstract/The Atomic Force Microscope (AFM) is a widely used, high resolution surface
imaging instrument. Making accurate nanometer-scale measurements with an AFM requires …

Traceability of measurements and calibration of devices are needed also at the nanometre
scale. Calibration of a commercial atomic force microscope (AFM) was studied as part of a …

The atomic force microscope (AFM) increasingly being used as a metrology tool in the
semiconductor industry where the features measured are at the nanometer level and …

We propose a standard stepped sample and specify a procedure for determining the step
height for height‐scale calibration of atomic force microscopy (AFM) instruments on the …

Atomic force microscopes (AFMs) generate three dimensional images with nanometer level
resolution and, consequently, are used in the semiconductor industry as tools for sub …

Atomic force microscopes (AFMs) are used in the semiconductor industry for a variety of
metrology purposes. Step height measurements at the nanometer level and roughness …

The National Institute of Standards and Technology (NIST) has a multifaceted program in
atomic force microscope (AFM) dimensional metrology. One component of this program, and …