In this paper, we report a new method of fabricating AFM (Atomic Force Microscope) probe
tips at low cost. Most of previous AFM probe tips have been made of SOI wafers using back …

A new method of fabricating atomic force microscope (AFM) probe tip is presented. In this
process, the probe tips were implemented using self-aligned heavily boron-doped silicon …

The paper presents a newly developed high-yield micro-fabrication technology for single-
crystalline silicon atomic force microscope (AFM) probes. Both the tips and the cantilevers …

As a first step to realize novel cantilevers to be used in the atomic force microscopy (AFM),
we have fabricated a Poly-Si cantilever with enhanced high-aspect-ratio nanotips. The tips …

Scanning rates of the atomic force microscope (AFM) could be significantly increased by
integrating the force sensing probe with microelectromechanical systems (MEMS). We …

A novel single-mask process for fabrication of silicon microcantilevers with integral silicon
tips for use in atomic force microscopy (AFM) is described. The highly cusped tips with radii …

In this paper a micromachining method for batch fabrication of in-plane atomic force
microscope (AFM) probes that consist of a sharp silicon nitride tip on a monocrystalline …

A simple and high yield method is presented for the bulk generation of atomic force
microscopy (AFM) probes with self‐sharpened silicon tips. The experimental setup includes …

The atomic force microscope (AFM) has the potential for profiling on a nanometer scale.
However, for the AFM to be useful as a reliable and accurate metrology tool, the atomic force …

An atomic force microscopy (AFM) tip characterizer with measurement ranges from 7.7 nm to
131 nm was developed using Si/SiO2 multilayers. This characterizer was constructed with …