The paper presents a newly developed high-yield micro-fabrication technology for single-
crystalline silicon atomic force microscope (AFM) probes. Both the tips and the cantilevers …

A novel single-mask process for fabrication of silicon microcantilevers with integral silicon
tips for use in atomic force microscopy (AFM) is described. The highly cusped tips with radii …

A simple, high yield method for the fabrication of cantilever with nano-silicon-tip by wet
etching for atomic force microscopy (AFM) applications is described in this paper. The nano …

Different fabrication technologies for atomic force microscopy (AFM) probes have been
investigated, emphasizing the fabrication of versatile tip shapes, which can be integrated …

In this paper a micromachining method for batch fabrication of in-plane atomic force
microscope (AFM) probes that consist of a sharp silicon nitride tip on a monocrystalline …

Scanning rates of the atomic force microscope (AFM) could be significantly increased by
integrating the force sensing probe with microelectromechanical systems (MEMS). We …

We propose a novel fabrication process for twin probes of an atomic force microscope (AFM)
that consist of a silicon dual tip with a narrow gap. The dual tip with a tetrahedral shape …

This work presents a novel fabrication technique for an atomic force microscope (AFM)
nanotip. The high-aspect-ratio silicon nanotip on a single-crystal silicon cantilever was …

We have developed a novel process for the microfabrication of atomic force microscope
(AFM) cantilevered tips from silicon-on-insulator (SOI) wafers. The tip and cantilever are …

First piezoresistive AFM sensor developed by Quate was based on SOI technology.
Alternative technology for fabrication of microtips integrated with silicon cantilever beam …