Dynamic measuring concepts of sensors use a variety of different metrics. Some monitor the
amplitude and/or phase, while others track resonance frequency or stability thresholds …

We present a case study of an active micro-electromechanical system (MEMS). The MEMS
cantilever has integrated actuation and sensor mechanisms, which enable the active …

Micro-electromechanical systems (MEMS) offer a wide range of applications, anything from
consumer electronics to research on biological samples. With increasingly stringent …

An ultrasensitive mass sensor is proposed by combining the benefits of mode localization
and nonlinear dynamics in two clamped–clamped microbeams of different lengths. The …

Due to the position-dependent nature of electrostatic forces, many microelectromechanical
(MEM) oscillators inherently feature parametric excitation. This work considers the nonlinear …

Microelectromechanical oscillators utilizing noninterdigitated combdrive actuators have the
ability to be parametrically excited, which leads to distinct advantages over harmonically …

Extensive development of micro/nano-electromechanical systems (MEMS/NEMS) has
resulted in technologies that exhibit excellent performance over a wide range of applications …

Triggering an alarm in a car for low air-pressure in the tire or tripping an HVAC compressor if
the refrigerant pressure is lower than a threshold value are examples for applications where …

MEMS resonators are becoming ubiquitous in modern signal processing systems. They are
increasingly being used as sensors, reference clocks, memory elements, and filters. A …

In an array of identical resonators coupled through weak springs, a small perturbation in the
structural properties of one of the resonators strongly impacts coupled oscillations causing …