Exploiting nonlinearity to enhance the sensitivity of mode-localized mass sensor based on electrostatically coupled MEMS resonators
An ultrasensitive mass sensor is proposed by combining the benefits of mode localization
and nonlinear dynamics in two clamped–clamped microbeams of different lengths. The …
and nonlinear dynamics in two clamped–clamped microbeams of different lengths. The …
Nonlinearity modulation in a mode-localized mass sensor based on electrostatically coupled resonators under primary and superharmonic resonances
A general model of a mode-localized mass sensor incorporating two weakly coupled
clamped-clamped microbeams under electrostatic excitation is presented, and a reduced …
clamped-clamped microbeams under electrostatic excitation is presented, and a reduced …
Mass sensing based on nonlinear intermodal coupling via 2: 1 internal resonance of electrostatically actuated clamped–clamped microbeams
P Kumar, DN Pawaskar, MM Inamdar - International Journal of Dynamics …, 2024 - Springer
Over recent decades, the application of internal resonance-based nonlinear intermodal
coupling in electromechanical resonators has shown promise for enhancing functionality …
coupling in electromechanical resonators has shown promise for enhancing functionality …
Design and modeling of a MEMS accelerometer based on coupled mode-localized nonlinear resonators under electrostatic actuation
A novel dual proof mass accelerometer is proposed by introducing mode localization in two
electrostatically coupled resonators. The levering mechanism is utilized to amplify the …
electrostatically coupled resonators. The levering mechanism is utilized to amplify the …
Computational investigation of high-order mode localization in electrostatically coupled microbeams with distributed electrodes for high sensitivity mass sensing
The high-order mode localization in electrostatically coupled microbeams with distributed
electrodes has been theoretically investigated and then introduced in high sensitivity mass …
electrodes has been theoretically investigated and then introduced in high sensitivity mass …
Exploiting bifurcation behaviors in parametrically excited mode-localized resonators for mass sensing
J Song, M Lyu, N Kacem, P Liu… - Journal of …, 2022 - asmedigitalcollection.asme.org
The demand for detecting minute mass in biology and chemistry promotes the research of
high sensitivity and strong robustness mass sensor based on MEMS resonators in the past …
high sensitivity and strong robustness mass sensor based on MEMS resonators in the past …
An asymmetric mode-localized mass sensor based on the electrostatic coupling of different structural modes with distributed electrodes
Mode-localized sensor with amplitude ratio as output metric has shown excellent potential in
the field of micromass detection. In this paper, an asymmetric mode-localized mass sensor …
the field of micromass detection. In this paper, an asymmetric mode-localized mass sensor …
Nonlinear analysis and effectiveness of weakly coupled microbeams for mass sensing applications
In this work, we develop a general model of a mass sensor made of N weakly mechanically
coupled microbeams subject to electric actuation. The developed model is verified by …
coupled microbeams subject to electric actuation. The developed model is verified by …
State-of-the-art in mode-localized MEMS coupled resonant sensors: A comprehensive review
V Pachkawade - IEEE Sensors Journal, 2021 - ieeexplore.ieee.org
This article reviews the investigation of the mode-localized microelectromechanical system
(MEMS) coupled resonant sensors. This class of a sensor features a new approach in the …
(MEMS) coupled resonant sensors. This class of a sensor features a new approach in the …
Nonlinearity enhanced mode localization in two coupled MEMS resonators
As an intriguing phenomenon in coupled dynamic systems, mode localization has garnered
considerable attention in areas such as vibration control, sensing, etc. This paper …
considerable attention in areas such as vibration control, sensing, etc. This paper …