Micro-machining using photo-polymerization and metal jet deposition
K Yamaguchi - … on Micromechanics and Human Science (Cat …, 1997 - ieeexplore.ieee.org
This research work deals with the development of a simple and practical method for
manufacturing micromechanical parts using different methods. The first method is a mask …
manufacturing micromechanical parts using different methods. The first method is a mask …
Consideration on the optimum conditions to produce micromechanical parts by photo polymerization using direct focused beam writing
K Yamaguchi, T Nakamoto - MHS'95. Proceedings of the …, 1995 - ieeexplore.ieee.org
This research work deals with the development of a simple and practical method for
manufacturing micromechanical parts. In this method, high aspect ratio polymer structures …
manufacturing micromechanical parts. In this method, high aspect ratio polymer structures …
Consideration on the producing of high aspect ratio micro parts using UV sensitive photopolymer
T Nakamoto, K Yamaguchi - MHS'96 Proceedings of the …, 1996 - ieeexplore.ieee.org
This research work deals with the methods for manufacturing high aspect ratio micro
mechanical parts by using UV photopolymer. In the first method, polymer structures are …
mechanical parts by using UV photopolymer. In the first method, polymer structures are …
[引用][C] Consideration on the accuracy of fabricating microstructures using UV laser induced polymerization
K Yamaguchi, T Nakamoto - 1994 5th International Symposium …, 1994 - ieeexplore.ieee.org
This study details fabrication of micromolds using three different methods. The first method is
mask-based method in which an image is transferred to the photopolymer layer by …
mask-based method in which an image is transferred to the photopolymer layer by …
[PDF][PDF] Micro fabrication by UV laser photopolymerization
K Yamaguchi, T Nakamoto - Nagoya University, School of …, 1998 - nagoya.repo.nii.ac.jp
This research deals with the development of simple and practical methods for manufacturing
high aspect ratio (height/width) micro parts and three-dimensional micro parts. The first …
high aspect ratio (height/width) micro parts and three-dimensional micro parts. The first …
Manufacturing of high aspect ratio micro structures using UV sensitive photopolymer
K Yamaguchi, T Nakamoto, P Abraha - JSME international journal …, 1996 - jstage.jst.go.jp
抄録 This research work deals with the development of a simple and practical method for
manufacturing high aspect ratio micro mechanical parts using three methods. The first …
manufacturing high aspect ratio micro mechanical parts using three methods. The first …
Real three dimensional micro fabrication using stereo lithography and metal molding
K Ikuta, K Hirowatari - [1993] Proceedings IEEE Micro Electro …, 1993 - ieeexplore.ieee.org
A technique for three-dimensional micro fabrication using stereo lithography is proposed. It
is called the IH process (integrated hardened polymer stereo lithography) and is suitable for …
is called the IH process (integrated hardened polymer stereo lithography) and is suitable for …
Photoforming applied to fine machining
T Takagi, N Nakajima - [1993] Proceedings IEEE Micro Electro …, 1993 - ieeexplore.ieee.org
Photoforming refers to optical forming methods such as stereolithography, photomask
layering, and the 1H process. In these processes, a special liquid resin is used as forming …
layering, and the 1H process. In these processes, a special liquid resin is used as forming …
Fabrication of seamless roller mold with excimer laser direct writing technology
YC Lee, PC Chen, HY Lin - 2009 4th IEEE International …, 2009 - ieeexplore.ieee.org
This paper presents a new method for fabricating a seamless roller mold with micrometer-
scaled features based on laser direct writing approach. In the process, a glass roller is first …
scaled features based on laser direct writing approach. In the process, a glass roller is first …
Manufacturing of three-dimensional micro-parts by UV laser induced polymerization
T Nakamoto, K Yamaguchi, PA Abraha… - Journal of …, 1996 - iopscience.iop.org
This research deals with the development of a simple and practical method for
manufacturing high-aspect-ratio (height/width) micro-parts and three-dimensional micro …
manufacturing high-aspect-ratio (height/width) micro-parts and three-dimensional micro …