Sensitivity improvement of a microcantilever based mass sensor
This article describes two approaches for sensitivity improvement of a micromachined silicon
T-shaped cantilever resonator for mass sensing applications. In order to increase sensitivity …
T-shaped cantilever resonator for mass sensing applications. In order to increase sensitivity …
A high sensitivity silicon microcantilever based mass sensor
A silicon microcantilever based mass sensor with picogram resolution has been fabricated.
In order to improve its sensitivity value, resonator dimensions were reduced. Working in …
In order to improve its sensitivity value, resonator dimensions were reduced. Working in …
CMOS micromachined capacitive cantilevers for mass sensing
YC Li, MH Ho, SJ Hung, MH Chen… - … of Micromechanics and …, 2006 - iopscience.iop.org
In this paper, we present the design, fabrication and characterization of the CMOS
micromachined cantilevers for mass sensing in the femtogram range. The cantilevers …
micromachined cantilevers for mass sensing in the femtogram range. The cantilevers …
System on chip mass sensor based on polysilicon cantilevers arrays for multiple detection
In this work, we present an on chip microelectromechanical system based on an array of
cantilevers for mass detection. The sensor transducer, using polysilicon as structural layer …
cantilevers for mass detection. The sensor transducer, using polysilicon as structural layer …
Cantilever based MEMS for multiple mass sensing
A cantilever based micro electro mechanical system (MEMS) for mass detection is
presented. The sensor for multiple detections is composed by several cantilevers in an array …
presented. The sensor for multiple detections is composed by several cantilevers in an array …
Microcantilever-based mass sensors: working at higher modes against reducing the dimensions
Enhanced sensitivity and quality factor of microcantilever (MC)-based mass sensors when
working at higher modes and reducing the dimensions are compared. By analysing the out …
working at higher modes and reducing the dimensions are compared. By analysing the out …
Improving picogram mass sensitivity via frequency doubling in coupled silicon micro-cantilevers
DF Wang, X Du, X Wang, T Ikehara… - … of Micromechanics and …, 2015 - iopscience.iop.org
Two geometrically different cantilevers, with primary frequencies of 182.506 kHz (u-shaped
cantilever for sensing) and 372.503 kHz (rectangular cantilever for detecting), were coupled …
cantilever for sensing) and 372.503 kHz (rectangular cantilever for detecting), were coupled …
Evaluation of resonating Si cantilevers sputter-deposited with AlN piezoelectric thin films for mass sensing applications
We report on a micro-machined resonator for mass sensing applications which is based on
a silicon cantilever excited with a sputter-deposited piezoelectric aluminium nitride (AlN) thin …
a silicon cantilever excited with a sputter-deposited piezoelectric aluminium nitride (AlN) thin …
A novel capacitive mass sensor using an open-loop controlled microcantilever
This article presents a method for quantitative estimation of the mass of an entity attached to
the surface of an electrostatically actuated clamped-free microbeam implemented as a mass …
the surface of an electrostatically actuated clamped-free microbeam implemented as a mass …
A new sensitivity improving approach for mass sensors through integrated optimization of both cantilever surface profile and cross-section
Sensitivity is of great importance for piezoelectric resonance mass sensors in the fields of
material and particle analyzing. Different from the custom used methods such as geometric …
material and particle analyzing. Different from the custom used methods such as geometric …