We report on a novel fabrication process and preliminary characterization of a
nanomechanical resonating device, which is to be used for mass detection. The fabrication …

We report on a micro-machined resonator for mass sensing applications which is based on
a silicon cantilever excited with a sputter-deposited piezoelectric aluminium nitride (AlN) thin …

We have fabricated Al nanocantilevers using a simple, one mask contact UV lithography
technique with lateral and vertical dimensions under 500 and 100 nm, respectively. These …

Nanomechanical resonators have been monolithically integrated on preprocessed
complementary metal-oxide-semiconductor (CMOS) chips. Fabricated resonator systems …

Micro/nanomechanical resonators have been designed and fabricated with the aim to be
used as distributed mass sensors for in situ measurement of the thickness of ultra-thin …

Miniaturization of cantilever dimensions will increase both the mass and spatial resolution of
a resonating cantilever-based mass sensor, which monitors the mass change of the …

This article describes two approaches for sensitivity improvement of a micromachined silicon
T-shaped cantilever resonator for mass sensing applications. In order to increase sensitivity …

We report on the resonant operation of high-quality-factor silicon nanomechanical structures
in air and at room temperature. We describe techniques used to actuate and detect …

We present a theoretical analysis of the vibrating resonator in cantilever and bridge
configurations operating as ultrasensitive mass sensors. An exact solution of the problem …

This paper reports on mass sensing with 33 nm thick single-crystalline cantilevers by a
double-beam laser Doppler vibrometer. The resonant frequency of an oscillating thin …