… a relatively new concept in the RF MEMS switches. Although a MEMS variable capacitor with
… A novel methodology to fabricate a two movable plate RF MEMS switch has recently been …

… The main reliability issues of typical RF MEMS switches are addressed in the concept from
… This paper describes in detail the RF MEMS switch concept of EADS in Section II including …

… capacitive RF-MEMS switches are … RF-MEMS switching unit with pronounced long-term
operability and cycling up to 1 billion in the K-band (18–27 GHz). Moreover, the switch concept …

… The electrostatic and piezoelectric actuation mechanisms can result in fast RF MEMS switches
and better reliability but at the cost of increased pull-in voltage. The electrostatic method …

… We report a theoretical analysis of a new concept of switch and rf MEMS with a ferroelectric
layer inserted in between the moving electrodes, namely the FeMEMS. Based on general …

… RF~MEMS switches are characterized by their high isolation, … Despite these benefits,
RF~MEMS switches are not yet seen … This thesis presents a novel MEMS switch concept based on …

… literature background of RF MEMS switches, especially for … RF MEMS switches can be
classified as vertical switches and lateral switches based on the motion direction of the switching …

… drawn by traditional solid-state RF switches forces the isolation to be … when the RF MEMS
switch is fabricated on silicon. … parallel RF MEMS switches to values in the range of 40–50 dB. …

… of the switch off-state capacitance on the switch isolation … RF MEMS switches have superior
insertion loss and isolation performance in comparison to MESFET and pin diode switches. …

… of the RF MEMS switches. Section 3 includes the characteristics and performances of RF
MEMS switches and finally Section 4 describes the conclusion of this review paper. …