Submicrometer defect detection in periodic structures by photorefractive holography: system design and performance

C Uhrich, L Hesselink - Applied optics, 1994 - opg.optica.org
We have built an adaptive system capable of detecting submicrometer defects in periodic
structures by using real-time holography in photorefractive crystals. We summarize the …
被引用次数：20 相关文章

Submicrometer defect detection in periodic structures by photorefractive holography: system design and performance

C Uhrich, L Hesselink - APPLIED OPTICS, 1994 - opg.optica.org
We have built an adaptive system capable of detecting submicrometer defects in periodic
structures by using real-time holography in photorefractive crystals. We summarize the …

Submicrometer defect detection in periodic structures by photorefractive holography: system design and performance

C Uhrich, L Hesselink - Applied optics, 1994 - pubmed.ncbi.nlm.nih.gov
We have built an adaptive system capable of detecting submicrometer defects in periodic
structures by using real-time holography in photorefractive crystals. We summarize the …
[PDF] academia.edu

[PDF][PDF] Submicrometer defect detection in periodic structures by photorefractive holography: system design and performance

C Uhrich, L Hesselink - APPLIED OPTICS, 1994 - academia.edu
We have built an adaptive system capable of detecting submicrometer defects in periodic
structures by using real-time holography in photorefractive crystals. We summarize the …

Submicrometer defect detection in periodic structures by photorefractive holography: system design and performance.

C Uhrich, L Hesselink - Applied Optics, 1994 - europepmc.org
We have built an adaptive system capable of detecting submicrometer defects in periodic
structures by using real-time holography in photorefractive crystals. We summarize the …

Submicrometer defect detection in periodic structures by photorefractive holography: system design and performance

C Uhrich, L Hesselink - Applied Optics, 1994 - ui.adsabs.harvard.edu
This paper describes the design and operation of a holographic defect enhancement
systems for the measurement of submicrometer defects in semiconductor structures for use …

[引用][C] SUBMICROMETER DEFECT DETECTION IN PERIODIC STRUCTURES BY PHOTOREFRACTIVE HOLOGRAPHY: SYSTEM DESIGN AND PERFORMANCE

C UHRICH, L HESSELINK - Applied optics, 1994 - Optical Society of America