Excimer laser fabrication of low-cost diffractive optical prototypes for CO2 laser marking applications

M Flury, JG Fontaine, P Gerard… - Computer-Controlled …, 1999 - spiedigitallibrary.org
We present a novel use of micro-machining with excimer laser: realization of reflective
diffractive optical elements (DOE) for laser marking. The DOE's design is first calculated …

Excimer laser ablation lithography applied to the fabrication of reflective diffractive optics

M Flury, A Benatmane, P Gerard, PC Montgomery… - Applied Surface …, 2003 - Elsevier
We propose a low cost technique for the production of diffractive optical elements (DOE).
These elements are devoted to high power lasers beam shaping in the mid-infrared …

Excimer laser patterned dielectric masks for the fabrication of diffractive optical elements by laser ablation

D Schäfer, J Ihlemann, K Mann, G Marowsky - Applied Physics A, 1999 - Springer
Masks for laser processing are generated by laser ablation patterning of dielectric layer
systems. The application of these masks for the rapid fabrication of diffractive optical …

Excimer laser micromachining for rapid fabrication of diffractive optical elements

GP Behrmann, MT Duignan - Applied optics, 1997 - opg.optica.org
Excimer laser micromachining for rapid fabrication of diffractive optical elements clickable
element to expand a topic LOGIN OR CREATE ACCOUNT PRISM SUBMISSION This website …

Fabrication of diffractive optical elements by ArF-laser ablation of fused silica

J Bekesi, D Schaefer, J Ihlemann… - Photon Processing in …, 2003 - spiedigitallibrary.org
Excimer laser ablation at 193 nm is used for the generation of a surface relief structure on
fused silica with the aim to fabricate diffractive optical phase elements to be applied for …

Diffractive optical elements for the infrared

H Haidner - 16th Congress of the International Commission for …, 1993 - spiedigitallibrary.org
Diffractive optical elements (DOEs) tend to become severe competitors to conventional
refractive optical elements, especially for monochromatic applications as in optical …

Excimer laser fabrication of diffractive optical elements

RJ Winfield, M Meister, GM Crean, S Paineau - Materials science in …, 2000 - Elsevier
Excimer lasers are well known for their ability to machine features on the micron scale.
Recently, they have been used to fabricate diffractive optical elements (DOEs). These …

Efficiency enhancement of diffractive optical elements by variable relief profiling

A Stemmer, H Zarschizky, E Knapek, G Lefranc… - Microelectronic …, 1995 - Elsevier
Diffractive optical elements (DOEs) are realized with various reliefs using e-beam
lithography and existing methodes for the production of microelectronic components …

Diffractive elements for generating microscale laser beam patterns: a Y2K problem

S Teiwes, S Krueger, GKG Wernicke… - … and Spatial Light …, 2000 - spiedigitallibrary.org
Lasers are widely used in industrial fabrication for engraving, cutting and many other
purposes. However, material processing at very small scales is still a matter of concern …

Diffractive optical elements fabricated by electron beam lithography

R Smith - Difraction Optics: Design, Fabrication, and Applications, 1992 - opg.optica.org
In recent years we have studied binary amplitude diffractive optical elements fabricated by
means of electron beam lithography in the form of opaque chrome rulings on glass …